Microfabrication Guidelines

Getting started

The Microfabrication Core is open to research staff and trainees from KRCBS and iBEST. We welcome all students who want access to the facility to send us training requests. External customers please contact Dario Bogojevic.

Cleanroom and Microfabrication Equipment

  • All new users must obtain an orientation training to get access to the cleanroom. This training takes approximately 30 min.
  • Prerequisite for the training is completed online Safety Training including Biosafety Training modules and Biosafety Modules for Wet Bench Researchers
  • All new users must attend a separate training session on each of the cleanroom instruments. Users must demonstrate competence in using the equipment prior to unassisted use.
  • To request training contact Dario Bogojevic.
  • Please use RFMBS website to book the equipment under category Microfabrication. Online scheduling is available only to those individuals who have received training on equipment.
  • Only authorized personnel must enter cleanroom.
  • Do not operate any equipment unless you have been approved to do so.
  • All personnel must wear proper cleanroom garments.
  • Don’t eat or drink in the cleanroom.
  • Use the fume hood for all operations involving poisonous or offensive gases or fumes as well as for operations involving highly flammable materials.
  • Dispose liquid waste into waste bottles. Don’t dispose chemical liquid waste into drain.
  • Unapproved, improperly labeled and unidentifiable materials will be discarded.
  • Only cleanroom papers and notebooks are allowed inside the cleanroom.
  • Please report any hardware or software problems or any misuse of equipment to the Microfabrication Specialist promptly so that steps can be taken to fix any issues.
  • After completing your work, the workstation should be clean and ready for the next user.
  • Users who don’t clean up after their work will be charged a fee of $80.
  • Mask aligner quick start guide
  • Spin coater in the cleanroom is for photoresist only (spin coater in the Room 779 is for PDMS and other polymers)
  • User must clean the spin coater after each use. Do not at any time force fluids or pressuring gas in the center of the vacuum chuck. Cleaning the vacuum path in this manner can cause significant damage to the spin coater.
  • Do not attempt to repair equipment, please notify Microfabrication Specialist.
  • Be sure to turn off the equipment after use and close CDA and vacuum valves.

Analytical Equipment

  • The instruments in the analytical lab can be accessed only by individuals who have been trained and demonstrated competency.
  • To request training contact Dario Bogojevic.
  • Please use RFMBS website to book the equipment under category Microfabrication. Online scheduling is available only to those individuals who have received training on equipment.

3D Printing and Rapid Prototyping

  • The 3D printer can be accessed only by individuals who have been trained and demonstrated competency.
  • To request training contact Dario Bogojevic.
  • Users set up and start their prints, monitor printing process, remove and clean parts.
  • Each user must clean the print bed by washing it with warm water only.
  • Don’t use any detergents or solvents on the print bed.
  • In order to offset operational expenses, a fee for service model has been implemented. To check current Fee Schedule please contact Dario Bogojevic.
  • If you need help with your 3D model, please contact Dario Bogojevic.
  • 3D printer user guides